High Precision Stress Measurements in Semiconductor Structures by Raman Microscopy

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Bibliographic Details

Authors and Corporations:	Uhlig, Benjamin, Eng, Lukas, Michaelis, Alexander
Title:	High Precision Stress Measurements in Semiconductor Structures by Raman Microscopy
Dissertation Note:	Dissertation, Technische Universität Dresden, 2009
Type of Resource:	E-Book Thesis
Language:	English
published:	Online-Ausg.. 2010
Subjects:	Stress Measurement Raman Ters Sers Spannungsmessung Hochschulschrift
Source:	Qucosa