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High Precision Stress Measurements in Semiconductor Structures by Raman Microscopy

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Bibliographic Details
Authors and Corporations: Uhlig, Benjamin, Eng, Lukas, Michaelis, Alexander
Title: High Precision Stress Measurements in Semiconductor Structures by Raman Microscopy
Dissertation Note: Dissertation, Technische Universität Dresden, 2009
Type of Resource: E-Book Thesis
Language: English
published:
Online-Ausg.. 2010
Subjects:
Source: Qucosa