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High Precision Stress Measurements in Semiconductor Structures by Raman Microscopy

Bibliographic Details
Authors and Corporations: Uhlig, Benjamin
Title: High Precision Stress Measurements in Semiconductor Structures by Raman Microscopy
Dissertation Note: Dissertation, Technische Universität Dresden, 2010
Type of Resource: E-Book
Language: English
Subjects:
Source: Qucosa