@phdthesis{ 22-14-qucosa-39924, title = {High Precision Stress Measurements in Semiconductor Structures by Raman Microscopy}, author = {Uhlig, Benjamin and Eng, Lukas and Michaelis, Alexander}, editor = {Eng, Lukas}, editor = {Eng, Lukas}, editor = {Michaelis, Alexander}, year = {2010}, language = {English}, url = {https://nbn-resolving.org/urn:nbn:de:bsz:14-qucosa-39924}, url = {https://katalog.skd.museum/Record/22-14-qucosa-39924} }