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Porous Ultra Low-k Material Integration Through An Extended Dual Damascene Approach: Pre-/ Post-CMP Curing Comparison, AMC 2015 – Advanced Metallization Conference

Bibliographic Details
Authors and Corporations: Calvo, Jesús, Koch, Johannes, Thrun, Xaver, Seidel, Robert, Uhlig, Benjamin
Title: Porous Ultra Low-k Material Integration Through An Extended Dual Damascene Approach: Pre-/ Post-CMP Curing Comparison (AMC 2015 – Advanced Metallization Conference)
Type of Resource: E-Article
Language: English
published:
Chemnitz Universitätsbibliothek Chemnitz 2016
Series: AMC 2015 – Advanced Metallization Conference
Subjects:
CMP
Source: Qucosa